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The Valve Manifold design is ideal for supplying specialty gases to process tools that manufacture the most challenging nanotechnology applications. The system is available in a variety of process-specific configurations.
An in-line architecture, unique to SEMI-GAS® Systems, and a compact modular design reduce the dead space volume compared to other high-purity valve manifold configurations.
Utilizing springless diaphragm valves, pressure transducers, and tied diaphragm regulators, the Valve Manifold Box is engineered to eliminate contamination of the source supply of specialty gases.
The result is a valve manifold with excellent purge efficiency providing maximum protection for both your operations and your processes.
SEMI-GAS® Systems, A Division ofApplied Energy Systems, Inc.180 Quaker LaneMalvern Pa.19355Phone: 610-647-8744; Fax: 610-640-4548
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SEMI-GAS® is a registered trademark of Applied Energy Systems, Inc.
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