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Semi-Gas Systems, Inc. Custom Gas Equipment Mass Flow Controller Box

Xturion™ Custom Gas Equipment


OEM Gas Box

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Customization

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Ordering Information

For information on OEM Gas Boxes contact your SEMI-GAS® Systems Sales Representative or call 610-647-8744


Features
  • Applicable to any OEM Gas Box Requirements
  • Engineered to Customer Specifications
  • Manufactured to Customer Specifications
  • Conventional or Surface Mounted Components
  • Custom Controls Available
  • Manufactured in Ultra-High Purity Environment

Engineering Data (pictured OEM Gas Box)
  • Dimensions: 20" T X 21" W X 9" D
  • Air Flow Requirements: 110 SCFM
  • Exhaust Duct: 6" Tall
  • Voltage: 100 To 240 VAC, 1 Phase
  • Frequency: 50 To 60 Hz

Materials of Construction (pictured OEM Gas Box)
  • 316 Stainless Steel Enclosure
  • Measures and Controls Continuous Gas Flow
  • Ultra-High Purity Components
  • Differential Pressure Controller
  • User Defined Set Points and Ranges
  • Analog and Digital Outputs

OEM Gas Box


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