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SEMI-GAS® Systems designs and manufactures gas cabinets for the safe handling, storage and delivery of hazardous gases (such as NH3, HCl, AsH3, and SiH4). SEMI-GAS® Systems Centurion™ Gas Cabinets are available in state-of-the-art PLC Controller driven Automatic and Semi Automatic designs. The Centurion™ Gas Cabinet product line is engineered to conform to SEMI-S2 and the International Fire Code. These easily expandable gas cabinets also meet the specific requirements of varied semiconductor fabs.
Our Featured Centurion™ Gas Cabinet configurations are shown below. If one of these configurations will not meet your requirements, SEMI-GAS® Systems is always available to design and manufacture customer specific systems.