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Includes: Centurion™ Gas Cabinets, Centurion™ Gas Panels, Nanoturion™ Valve Manifold Boxes, Megaturion™ Bulk Specialty Gas Systems, Xturion™ Custom Gas Equipment and GigaGuard™ Controller Systems.

SEMI-GAS® Systems supplies ultra-high purity gas source systems, distribution systems and control technology to leaders in the Semiconductor industry as well as customers in related industries that seek our world-class designs for safety, quality and performance:

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Design and Manufacture

SEMI-GAS® Systems designs and manufactures Gas Distribution Systems and Gas Delivery Systems including gas cabinets, gas panels, valve manifold boxes, bulk specialty gas systems and custom gas equipment.

Safety and Reliability

SEMI-GAS® Systems gas handling systems and equipment deliver the safety, performance and reliability required in the most advanced semiconductor production, R&D environments and other critical applications.


SEMI-GAS® Systems source systems are the result of 30 years of innovation in Gas Distribution Systems and Control Technology. SEMI-GAS® Systems company was the first supplier of micro-processor based automated gas source systems.

PLC Control

SEMI-GAS® Systems gas source systems are available in state-of-the-art PLC driven Automatic, Semi Automatic and Manual designs.

Engineered to Outperform

SEMI-GAS® Systems gas panels, cabinet enclosures and valve manifold boxes are engineered to deliver the performance required in the manufacturing of the most advanced electronic devices. Whether the gas is toxic, flammable, corrosive or inert, the SEMI-GAS® Systems gas distribution system will deliver the highest process purity, improve product performance and reduce the overall cost of ownership.

SEMI-GAS® Systems has one of the largest installed bases of gas handling equipment worldwide.


Reliability Built In

SEMI-GAS® Systems gas distribution panels, valve manifold boxes and cabinet enclosures are engineered for long term performance. As part of a comprehensive quality assurance program, each panel is rigorously tested for proper performance, first at the component level, then on the panel, and finally after installation into the cabinet.

Reliability Data:
  SEMI S2 Compliant Gas Cabinet
  Uptime - 99.99+%
  MTTR - 2.3 hours


Standard and Custom Systems

SEMI-GAS® Systems gas panels, cabinet enclosures and valve manifold boxes are available in standard designs to promote the safe handling and control of hazardous materials. Recognizing that many of our customers needs are unique and cannot be accommodated by a standard product, SEMI-GAS® Systems experience allows us to provide customized systems tailored to meet each customer's individual process requirements whenever the application arises. Many complex gas distribution and containment applications can be simply addressed through modifying our standard products to provide a custom solution.